Example of ASCII Technology File Data for MPT

In this example,

• The number of masks per layer is set for each layer that has more than one mask.
• The member constraint groups, minEndOfLineSpacingAndSameMaskCG, minSpacingTableAndSameMaskCG, and minViaSpacingAndSameMaskCG, are referenced in the foundry constraint group.

First, the number of masks per layer is set.

Next, the member constraint groups are created.

The minEndOfLineSpacingAndSameMaskCG member group sets the minEndOfLineSpacing constraint for end-to-end and end-to-side same-mask spacing ANDed with the foundry minEndOfLineSpacing rule.

The minSpacingTableAndSameMaskCG member group sets the minSpacing constraint for side-to-side and corner-to-corner same-mask spacing ANDed with the foundry minSpacing rules.

The minViaSpacingAndSameMaskCG member group sets the minViaSpacing constraint for via-to-via same-mask spacing ANDed with the foundry minViaSpacing rules.

Finally, the member groups are specified in the foundry constraint group.

;;; Specification of member constraint groups in the foundry constraint group

;( group                    [override] )
;( -----    ------------ )
( "foundry"          nil
   memberConstraintGroups(
    ; listed in order of precedence
    "minEndOfLineSpacingAndSameMaskCG"
    "minSpacingTableAndSameMaskCG"
    "minViaSpacingAndSameMaskCG"
    ); memberConstraintGroups

Related Topics

Multi-Patterning Support in Virtuoso

Prerequisites for Virtuoso Multi-Patterning Technology

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