read_litho_errors
read_litho_errors -files_fileName[ -annotation_limiti_count] [ -layers {s_layerName…} ] [ -region {f_xlof_ylof_xhif_yhi} ] [ -severity {i_severityLevel…} ] [ -types { [LINEEND] [SPACING] [WIDTH] [ENCLOSURE [ABOVE|BELOW] ] [SPACEEND] [GATE_CD] [s_errorTypeName] } ]
Description
Loads a Litho error file and creates annotations for the error markers in the error file. The error marker annotations are added to the annotation:violation purpose for the layer and appear on the Violations page of the Annotation Browser under Lithography Errors, grouped by error type, layer, and severity.
The error types are given in the Litho error file as follows:
- SPACING is a fault where two wires may be unacceptably close or merge during manufacturing, also known as bridging.
- ENCLOSURE is a fault where the contact metal of a via may not be sufficiently covered by metal to form an acceptable electrical connection during manufacturing. Enclosure error types can be qualified as ABOVE or BELOW, which specifies whether the enclosure error refers to the via contacting this layer from above or below, respectively.
- WIDTH is a fault where a wire may become unacceptably narrow during manufacturing. also known as necking.
- LINEEND is a fault where the wire is unacceptably shorter in length than the drawn dimension.
- SPACEEND is a fault where metal separating two slots narrows unacceptably.
- GATE_CD is a fault where the critical dimension of a device gate varies unacceptably across process variation.
- Other error types can be specified in the Litho error file. These are new error type prototypes. The semantics of the error file will uniquely identify these names.
The Litho error file can contain suggestions, or hints, for how an error can be corrected.
Arguments
Examples
The following example reads lithography markers from my_litho_file.
read_litho_errors -file my_litho_file
Related Topics
Return to top