Product Documentation
Virtuoso Multi-Patterning Technology User Guide
Product Version IC23.1, November 2023

Number of Masks Per Layer

By default, there is one mask per layer. For layers that support more than one mask, you must specify the number of masks in a column of the DFII ASCII technology file techLayers section.

When there is more than one mask for a layer, the masks are represented by colors in Virtuoso:

The color choices for a layer are dependent on the number of masks that have been set for the layer in the technology file.

For an example of how to set the number of masks for a layer in an ASCII technology file, refer to Example of ASCII Technology File Data for MPT.


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