Same-Mask and Diff-Mask Spacing Constraints

For active color management, same-mask and different mask (diff-mask) spacing constraints must be set in the technology database. The table below lists the supported constraints and parameters for mask coloring.

Table -1 Same-Mask and Diff-Mask Spacing Constraints
Spacing Check	Constraint	Constraint Parameters
Side-to-Side	minSpacing	'sameMask
Corner-to-Corner	minSpacing (PRL<0)	'sameMask
Corner-to-Corner	minCornerSpacing	'sameMask
End-to-Edge	minEndOfLineSpacing	'sameMask 'diffMask
End-to-Edge	minEndOfLineExtensionSpacing	'sameMask
Edge-to-edge	minSpanLengthSpacing	'sameMask
Joint corner-to-joint corner	minJointCornerSpacing	'sameMask
End-to-corner or edge	endOfLineKeepout	'mask1 \| 'mask2 \| 'mask3
Via-to-Via	minViaSpacing	'sameMask
Cut class-to-cut class	minCutClassSpacing	'sameMask

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Virtuoso Multi-Patterning Technology User GuideProduct Version IC23.1, November 2023

Same-Mask and Diff-Mask Spacing Constraints

Table -1 Same-Mask and Diff-Mask Spacing Constraints

Virtuoso Multi-Patterning Technology User Guide
Product Version IC23.1, November 2023