|
Parameter Name
|
Description
|
|
LVTO
|
VTO length sensitivity
|
|
WVTO
|
VTO width sensitivity
|
|
PVTO
|
VTO length and width sensitivity
|
|
LK1
|
K1 length sensitivity
|
|
WK1
|
K1 width sensitivity
|
|
PK1
|
K1 length and width sensitivity
|
|
LK2
|
K2 length sensitivity
|
|
WK2
|
K2 width sensitivity
|
|
PK2
|
K2 length and width sensitivity
|
|
LDVT0
|
DVT0 length sensitivity
|
|
WDVT0
|
DVT0 width sensitivity
|
|
PDVT0
|
DVT0 length and width sensitivity
|
|
LDVT1
|
DVT1 length sensitivity
|
|
WDVT1
|
DVT1 width sensitivity
|
|
PDVT1
|
DVT1 length and width sensitivity
|
|
LDVT2
|
DVT2 length sensitivity
|
|
WDVT2
|
DVT2 width sensitivity
|
|
PDVT2
|
DVT2 length and width sensitivity
|
|
LDVT0W
|
DVT0W length sensitivity
|
|
WDVT0W
|
DVT0W width sensitivity
|
|
PDVT0W
|
DVT0W length and width sensitivity
|
|
LDVT1W
|
DVT1W length sensitivity
|
|
WDVT1W
|
DVT1W width sensitivity
|
|
PDVT1W
|
DVT1W length and width sensitivity
|
|
LDVT2W
|
DVT2W length sensitivity
|
|
WDVT2W
|
DVT2W width sensitivity
|
|
PDVT2W
|
VFB length and width sensitivity
|
|
LLETA0
|
LETA0 length sensitivity
|
|
WLETA0
|
LETA0 width sensitivity
|
|
PLETA0
|
LETA0 length and width sensitivity
|
|
LETAB
|
ETAB length sensitivity
|
|
WETAB
|
ETAB width sensitivity
|
|
PETAB
|
ETAB length and width sensitivity
|
|
LNSUB
|
NSUB length sensitivity
|
|
WNSUB
|
NSUB width sensitivity
|
|
PNSUB
|
NSUB length and width sensitivity
|
|
LNCH
|
NCH length sensitivity
|
|
WNCH
|
NCH width sensitivity
|
|
PNCH
|
NCH length and width sensitivity
|
|
LNGATE
|
NGATE length sensitivity
|
|
WNGATE
|
NGATE width sensitivity
|
|
PNGATE
|
NGATE length and width sensitivity
|
|
LXJ
|
XJ length sensitivity
|
|
WXJ
|
XJ width sensitivity
|
|
PXJ
|
XJ length and width sensitivity
|
|
LU0
|
U0 length sensitivity
|
|
WU0
|
U0 width sensitivity
|
|
PU0
|
U0 length and width sensitivity
|
|
LVSAT
|
VSAT length sensitivity
|
|
WVSAT
|
VSAT width sensitivity
|
|
PVSAT
|
VSAT length and width sensitivity
|
|
LUA
|
UA length sensitivity
|
|
WUA
|
UA width sensitivity
|
|
PUA
|
UA length and width sensitivity
|
|
LUB
|
UB length sensitivity
|
|
WUB
|
UB width sensitivity
|
|
PUB
|
UB length and width sensitivity
|
|
LUC
|
UC length sensitivity
|
|
WUC
|
UC width sensitivity
|
|
PUC
|
UC length and width sensitivity
|
|
LPCLM
|
PCLM length sensitivity
|
|
WPCLM
|
PCLM width sensitivity
|
|
PPCLM
|
PCLM length and width sensitivity
|
|
LPDIBLC1
|
PDIBLC1 length sensitivity
|
|
WPDIBLC1
|
PDIBLC1 width sensitivity
|
|
PPDIBLC1
|
PDIBLC1 length and width sensitivity
|
|
LPDIBLC2
|
PDIBLC2 length sensitivity
|
|
WPDIBLC2
|
PDIBLC2 width sensitivity
|
|
PPDIBLC2
|
PDIBLC2 length and width sensitivity
|
|
LPDIBLCB
|
PDIBLCB length sensitivity
|
|
WPDIBLCB
|
PDIBLCB width sensitivity
|
|
PPDIBLCB
|
PDIBLCB length and width sensitivity
|
|
LPSCBE2
|
PSCBE2 length sensitivity
|
|
WPSCBE2
|
PSCBE2 width sensitivity
|
|
PPSCBE2
|
PSCBE2 length and width sensitivity
|
|
LVOFF
|
VOFF length sensitivity
|
|
WVOFF
|
VOFF width sensitivity
|
|
PVOFF
|
VOFF length and width sensitivity
|
|
LRDSW
|
RDSW length sensitivity
|
|
WRDSW
|
RDSW width sensitivity
|
|
PRDSW
|
RDSW length and width sensitivity
|
|
LPRWB
|
PRWB length sensitivity
|
|
WPRWB
|
PRWB width sensitivity
|
|
PPRWB
|
PRWB length and width sensitivity
|
|
LPRWG
|
PRWG length sensitivity
|
|
WPRWG
|
PRWG width sensitivity
|
|
PPRWG
|
PRWG length and width sensitivity
|
|
LPRT
|
PRT length sensitivity
|
|
WPRT
|
PRT width sensitivity
|
|
PPRT
|
PRT length and width sensitivity
|
|
LAGS
|
AGS length sensitivity
|
|
WAGS
|
AGS width sensitivity
|
|
PAGS
|
AGS length and width sensitivity
|
|
LPVAG
|
PVAG length sensitivity
|
|
WPVAG
|
PVAG width sensitivity
|
|
PPVAG
|
PVAG length and width sensitivity
|
|
LKETA
|
KETA length sensitivity
|
|
WKETA
|
KETA width sensitivity
|
|
PKETA
|
KETA length and width sensitivity
|
|
LELM
|
ELM length sensitivity
|
|
WELM
|
ELM width sensitivity
|
|
PELM
|
ELM length and width sensitivity
|
|
LUTE
|
UTE length sensitivity
|
|
WUTE
|
UTE width sensitivity
|
|
PUTE
|
UTE length and width sensitivity
|
|
LCDSC
|
CDSC length sensitivity
|
|
WCDSC
|
CDSC width sensitivity
|
|
PCDSC
|
CDSC length and width sensitivity
|
|
LCDSCB
|
CDSCB length sensitivity
|
|
WCDSCB
|
CDSCB width sensitivity
|
|
PCDSCB
|
CDSCB length and width sensitivity
|
|
LCDSCD
|
CDSCD length sensitivity
|
|
WCDSCD
|
CDSCD width sensitivity
|
|
PCDSCD
|
CDSCD length and width sensitivity
|
|
LNFACTOR
|
NFACTOR length sensitivity
|
|
WNFACTOR
|
NFACTOR width sensitivity
|
|
PNFACTOR
|
NFACTOR length and width sensitivity
|
|
LCIT
|
CIT length sensitivity
|
|
WCIT
|
CIT width sensitivity
|
|
PCIT
|
CIT length and width sensitivity
|
|
LAT
|
AT length sensitivity
|
|
WAT
|
AT width sensitivity
|
|
PAT
|
AT length and width sensitivity
|
|
LA0
|
A0 length sensitivity
|
|
WA0
|
A0 width sensitivity
|
|
PA0
|
A0 length and width sensitivity
|
|
LA1
|
A1 length sensitivity
|
|
WA1
|
A1 width sensitivity
|
|
PA1
|
A1 length and width sensitivity
|
|
LA2
|
A2 length sensitivity
|
|
WA2
|
A2 width sensitivity
|
|
PA2
|
A2 length and width sensitivity
|
|
LKT1
|
KT1 length sensitivity
|
|
WKT1
|
KT1 width sensitivity
|
|
PKT1
|
KT1 length and width sensitivity
|
|
LKT1L
|
KT1L length sensitivity
|
|
WKT1L
|
KT1L width sensitivity
|
|
PKT1L
|
KT1L length and width sensitivity
|
|
LKT2
|
KT2 length sensitivity
|
|
WKT2
|
KT2 width sensitivity
|
|
PKT2
|
KT2 length and width sensitivity
|
|
LK3
|
K3 length sensitivity
|
|
WK3
|
K3 width sensitivity
|
|
PK3
|
K3 length and width sensitivity
|
|
LK3B
|
K3B length sensitivity
|
|
WK3B
|
K3B width sensitivity
|
|
PK3B
|
K3B length and width sensitivity
|
|
LW0
|
W0 length sensitivity
|
|
WW0
|
W0 width sensitivity
|
|
PW0
|
W0 length and width sensitivity
|
|
LNLX
|
NLX length sensitivity
|
|
WNLX
|
NLX width sensitivity
|
|
PNLX
|
NLX length and width sensitivity
|
|
LDROUT
|
DROUT length sensitivity
|
|
WDROUT
|
DROUT width sensitivity
|
|
PDROUT
|
DROUT length and width sensitivity
|
|
LDSUB
|
DSUB length sensitivity
|
|
WDSUB
|
DSUB width sensitivity
|
|
PDSUB
|
DSUB length and width sensitivity
|
|
LUA1
|
UA1 length sensitivity
|
|
WUA1
|
UA1 width sensitivity
|
|
PUA1
|
UA1 length and width sensitivity
|
|
LUB1
|
UB1 length sensitivity
|
|
WUB1
|
UB1 width sensitivity
|
|
PUB1
|
UB1 length and width sensitivity
|
|
LUC1
|
UC1 length sensitivity
|
|
WUC1
|
UC1 width sensitivity
|
|
PUC1
|
UC1 length and width sensitivity
|
|
LDELTA
|
DELTA length sensitivity
|
|
WDELTA
|
DELTA width sensitivity
|
|
PDELTA
|
DELTA length and width sensitivity
|
|
LB0
|
B0 length sensitivity
|
|
WB0
|
B0 width sensitivity
|
|
PB0
|
B0 length and width sensitivity
|
|
LB1
|
B1 length sensitivity
|
|
WB1
|
B1 width sensitivity
|
|
PB1
|
B1 length and width sensitivity
|
|
LWR
|
WR length sensitivity
|
|
WWR
|
WR width sensitivity
|
|
PWR
|
WR length and width sensitivity
|
|
LDWG
|
DWG length sensitivity
|
|
WDWG
|
DWG width sensitivity
|
|
PDWG
|
DWG length and width sensitivity
|
|
LDWB
|
DWB length sensitivity
|
|
WDWB
|
DWB width sensitivity
|
|
PDWB
|
DWB length and width sensitivity
|
|
LALPHA0
|
ALPHA0 length sensitivity
|
|
WALPHA0
|
ALPHA0 width sensitivity
|
|
PALPHA0
|
ALPHA0 length and width sensitivity
|
|
LALPHA1
|
ALPHA1 length sensitivity
|
|
WALPHA1
|
ALPHA1 width sensitivity
|
|
PALPHA1
|
ALPHA1 length and width sensitivity
|
|
LBETA0
|
BETA0 length sensitivity
|
|
WBETA0
|
BETA0 width sensitivity
|
|
PBETA0
|
BETA0 length and width sensitivity
|
|
LDWC
|
DWC length sensitivity
|
|
WDWC
|
DWC width sensitivity
|
|
PDWC
|
DWC length and width sensitivity
|
|
LDLC
|
DLC length sensitivity
|
|
WDLC
|
DLC width sensitivity
|
|
PDLC
|
DLC length and width sensitivity
|
|
LCGSL
|
CGSL length sensitivity
|
|
WCGSL
|
CGSL width sensitivity
|
|
PCGSL
|
CGSL length and width sensitivity
|
|
LCGDL
|
CGDL length sensitivity
|
|
WCGDL
|
CGDL width sensitivity
|
|
PCGDL
|
CGDL length and width sensitivity
|
|
LCKAPPA
|
CKAPPA length sensitivity
|
|
WCKAPPA
|
CKAPPA width sensitivity
|
|
PCKAPPA
|
CKAPPA length and width sensitivity
|
|
LCLC
|
CLC length sensitivity
|
|
WCLC
|
CLC width sensitivity
|
|
PCLC
|
CLC length and width sensitivity
|
|
LCLE
|
CLE length sensitivity
|
|
WCLE
|
CLE width sensitivity
|
|
PCLE
|
CLE length and width sensitivity
|
|
LCF
|
CF length sensitivity
|
|
WCF
|
CF width sensitivity
|
|
PCF
|
CF length and width sensitivity
|
|
LACDE
|
ACDE length sensitivity
|
|
WACDE
|
ACDE width sensitivity
|
|
PACDE
|
ACDE length and width sensitivity
|
|
LMOIN
|
MOIN length sensitivity
|
|
WMOIN
|
MOIN width sensitivity
|
|
PMOIN
|
MOIN length and width sensitivity
|
|
LNOFF
|
NOFF length sensitivity
|
|
WNOFF
|
NOFF width sensitivity
|
|
PNOFF
|
NOFF length and width sensitivity
|
|
LVOFFCV
|
VOFFCV length sensitivity
|
|
WVOFFCV
|
VOFFCV width sensitivity
|
|
PVOFFCV
|
VOFFCV length and width sensitivity
|
|
LGAMMA1
|
GAMMA1 length sensitivity
|
|
WGAMMA1
|
GAMMA1 width sensitivity
|
|
PGAMMA1
|
GAMMA1 length and width sensitivity
|
|
LGAMMA2
|
GAMMA2 length sensitivity
|
|
WGAMMA2
|
GAMMA2 width sensitivity
|
|
PGAMMA2
|
GAMMA2 length and width sensitivity
|
|
LVFB
|
VFB length sensitivity
|
|
WVFB
|
VFB width sensitivity
|
|
PVFB
|
VFB length and width sensitivity
|
|
LVFBCV
|
VFBCV length sensitivity
|
|
WVFBCV
|
VFBCV width sensitivity
|
|
PVFBCV
|
VFBCV length and width sensitivity
|
|
LVBX
|
VBX length sensitivity
|
|
WVBX
|
VBX width sensitivity
|
|
PVBX
|
VBX length and width sensitivity
|
|
LVBM
|
VBM length sensitivity
|
|
WVBM
|
VBM width sensitivity
|
|
PVBM
|
VBM length and width sensitivity
|
|
LXT
|
XT length sensitivity
|
|
WXT
|
XT width sensitivity
|
|
PXT
|
XT length and width sensitivity
|